Quartz Clean Systems
- Horizontal - For immersion cleaning horizontal furnace tubes in a horizontal position
- Gemini - For spray cleaning horizontal furnace tubes in a vertical position
- VFQC - For spray and immersion cleaning of vertical furnace tubes
- Proteus - For immersion cleaning of small quartz, graphite and other parts
- EPI - For spray cleaning of epitaxial bell jars
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Metal Parts Clean Systems
- Immersion DEPI - For immersion cleaning of metal shield associated with PUD process
- Spray DEPI - For spray cleaning of metal shields associated with PUD process
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